Abstract

We report a simple, yet effective, MEMS structure to mitigate the external mechanical perturbation, such as shock. A conventional single membrane can travel beyond allowed distance to be damaged upon an external shock. The excessive travel can be reduced by having an additional electrode to attract the membrane electrostatically. The added elements, in conjunction with fine control algorithm, mitigate the impact of shock. The dual membrane structure effectively reduces the travel distance by 37 %, upon deploying merely 0.5 V. The dynamic implementation of shock mitigation method, using an on-board accelerometer together, delivered successful in-situ mitigation of shock on a dual-membrane MEMS microphone.

Original languageEnglish (US)
Title of host publication2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
EditorsMark G. Allen, Tina Lamers
PublisherTransducer Research Foundation
Pages458-459
Number of pages2
ISBN (Electronic)9781940470023
DOIs
StatePublished - Jan 1 2016
Event2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States
Duration: Jun 5 2016Jun 9 2016

Publication series

Name2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
CountryUnited States
CityHilton Head
Period6/5/166/9/16

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ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Chen, A., Nam, S., Lai, Y. C., & Chae, J. (2016). Shock mitigated micro-electromechanical systems structure. In M. G. Allen, & T. Lamers (Eds.), 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 (pp. 458-459). (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2016.123