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Shallow source/drain extensions for deep submicron MOSFETs using spin-on-dopants
Chakravarthy Gopalan, Partha S. Chakraborty, Jinman Yang, Taehoon Kim, Zhiyuan Wu, Martha McCartney, Stephen Goodnick, Michael Kozicki, Trevor Thornton
Research output: Contribution to journal › Article › peer-review
7
Scopus
citations