Set-membership estimation for weakly nonlinear models: An application to the adaptive control of semiconductor manufacturing processes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

In this paper we consider an application of set-membership concepts to the parameter estimation problem for weakly nonlinear models. We develop a recursive algorithm that, given input-output data, a bound on the measurement noise and a local bound on the Hessian of the nonlinear model with respect to the unknown parameters, produces a consistent ellipsoid containing the `actual' model parameters. To illustrate the use of this algorithm, we consider the process of oxidation of silicon in dry oxygen where the oxidation time is determined by means of a simple adaptive controller. In an effort to reduce the parametric uncertainty, we employ an auxiliary set-membership estimator to update the set of parameter constraints on-line and, thus, avoid unnecessary drifts of the adaptive controller parameters.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Conference on Decision and Control
PublisherIEEE
Pages1066-1071
Number of pages6
Volume2
StatePublished - 1994
EventProceedings of the 33rd IEEE Conference on Decision and Control. Part 1 (of 4) - Lake Buena Vista, FL, USA
Duration: Dec 14 1994Dec 16 1994

Other

OtherProceedings of the 33rd IEEE Conference on Decision and Control. Part 1 (of 4)
CityLake Buena Vista, FL, USA
Period12/14/9412/16/94

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

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    Tsakalis, K., & Song, L. (1994). Set-membership estimation for weakly nonlinear models: An application to the adaptive control of semiconductor manufacturing processes. In Proceedings of the IEEE Conference on Decision and Control (Vol. 2, pp. 1066-1071). IEEE.