Semiconductor manufacturing scheduling and dispatching: State of the art and survey of needs

Michele E. Pfund, Scott J. Mason, John Fowler

Research output: Chapter in Book/Report/Conference proceedingChapter

32 Citations (Scopus)

Abstract

This chapter discusses scheduling and dispatching in one of the most complex manufacturing environments-wafer fabrication facilities. These facilities represent the most costly and time-consuming portion of the semiconductor manufacturing process. After a brief introduction to wafer fabrication operations, the results of a survey of semiconductor manufacturers that focused on the current state of the practice and future needs are presented. Then the chapter presents a review of some recent dispatching approaches and finally an overview of a recent deterministic scheduling approach is provided.

Original languageEnglish (US)
Title of host publicationInternational Series in Operations Research and Management Science
PublisherSpringer New York LLC
Pages213-241
Number of pages29
Volume89
StatePublished - 2006

Publication series

NameInternational Series in Operations Research and Management Science
Volume89
ISSN (Print)08848289

Fingerprint

Semiconductor Manufacturing
Dispatching
Wafer
Fabrication
Deterministic Scheduling
Scheduling
Semiconductor materials
Semiconductors
Manufacturing
Wafer fabrication
Semiconductor manufacturing
Review
Manufacturing process

Keywords

  • Dispatching
  • Scheduling
  • Semiconductor manufacturing

ASJC Scopus subject areas

  • Management Science and Operations Research
  • Strategy and Management
  • Applied Mathematics
  • Computer Science Applications
  • Software

Cite this

Pfund, M. E., Mason, S. J., & Fowler, J. (2006). Semiconductor manufacturing scheduling and dispatching: State of the art and survey of needs. In International Series in Operations Research and Management Science (Vol. 89, pp. 213-241). (International Series in Operations Research and Management Science; Vol. 89). Springer New York LLC.

Semiconductor manufacturing scheduling and dispatching : State of the art and survey of needs. / Pfund, Michele E.; Mason, Scott J.; Fowler, John.

International Series in Operations Research and Management Science. Vol. 89 Springer New York LLC, 2006. p. 213-241 (International Series in Operations Research and Management Science; Vol. 89).

Research output: Chapter in Book/Report/Conference proceedingChapter

Pfund, ME, Mason, SJ & Fowler, J 2006, Semiconductor manufacturing scheduling and dispatching: State of the art and survey of needs. in International Series in Operations Research and Management Science. vol. 89, International Series in Operations Research and Management Science, vol. 89, Springer New York LLC, pp. 213-241.
Pfund ME, Mason SJ, Fowler J. Semiconductor manufacturing scheduling and dispatching: State of the art and survey of needs. In International Series in Operations Research and Management Science. Vol. 89. Springer New York LLC. 2006. p. 213-241. (International Series in Operations Research and Management Science).
Pfund, Michele E. ; Mason, Scott J. ; Fowler, John. / Semiconductor manufacturing scheduling and dispatching : State of the art and survey of needs. International Series in Operations Research and Management Science. Vol. 89 Springer New York LLC, 2006. pp. 213-241 (International Series in Operations Research and Management Science).
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