Semiconductor manufacturing scheduling and dispatching: State of the art and survey of needs

Michele E. Pfund, Scott J. Mason, John Fowler

Research output: Chapter in Book/Report/Conference proceedingChapter

33 Scopus citations

Abstract

This chapter discusses scheduling and dispatching in one of the most complex manufacturing environments-wafer fabrication facilities. These facilities represent the most costly and time-consuming portion of the semiconductor manufacturing process. After a brief introduction to wafer fabrication operations, the results of a survey of semiconductor manufacturers that focused on the current state of the practice and future needs are presented. Then the chapter presents a review of some recent dispatching approaches and finally an overview of a recent deterministic scheduling approach is provided.

Original languageEnglish (US)
Title of host publicationInternational Series in Operations Research and Management Science
PublisherSpringer New York LLC
Pages213-241
Number of pages29
StatePublished - Jan 1 2006

Publication series

NameInternational Series in Operations Research and Management Science
Volume89
ISSN (Print)0884-8289

Keywords

  • Dispatching
  • Scheduling
  • Semiconductor manufacturing

ASJC Scopus subject areas

  • Software
  • Computer Science Applications
  • Strategy and Management
  • Management Science and Operations Research
  • Applied Mathematics

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  • Cite this

    Pfund, M. E., Mason, S. J., & Fowler, J. (2006). Semiconductor manufacturing scheduling and dispatching: State of the art and survey of needs. In International Series in Operations Research and Management Science (pp. 213-241). (International Series in Operations Research and Management Science; Vol. 89). Springer New York LLC.