Self-focused ZnO transducers for ultrasonic biomicroscopy

J. M. Cannata, J. A. Williams, Q. F. Zhou, L. Sun, K. K. Shung, H. Yu, E. S. Kim

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

A simple fabrication technique was developed to produce high frequency (100 MHz) self-focused single element transducers with sputtered zinc oxide (ZnO) crystal films. This technique requires the sputtering of a ZnO film directly onto a curved backing substrate. Transducers were fabricated by sputtering an 18 μm thick ZnO layer on 2 mm diameter aluminum rods with ends shaped and polished to produce a 2 mm focus or f-number equal to one. The aluminum rod served a dual purpose as the backing layer and positive electrode for the resultant transducers. A 4 μm Parylene matching layer was deposited on the transducers after housing and interconnect. This matching layer was used to protect the substrate and condition the transfer of acoustic energy between the ZnO film and the load medium. The pulse-echo response for a representative transducer was centered at 101 MHz with a -6 dB bandwidth of 49%. The measured two way insertion loss was 44 dB. A tungsten wire phantom and an adult zebrafish eye were imaged to show the capability of these transducers.

Original languageEnglish (US)
Article number084109
JournalJournal of Applied Physics
Volume103
Issue number8
DOIs
StatePublished - 2008

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zinc oxides
transducers
ultrasonics
backups
oxide films
rods
sputtering
aluminum
insertion loss
echoes
tungsten
wire
bandwidth
fabrication
electrodes
acoustics
pulses
crystals
energy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Cannata, J. M., Williams, J. A., Zhou, Q. F., Sun, L., Shung, K. K., Yu, H., & Kim, E. S. (2008). Self-focused ZnO transducers for ultrasonic biomicroscopy. Journal of Applied Physics, 103(8), [084109]. https://doi.org/10.1063/1.2907716

Self-focused ZnO transducers for ultrasonic biomicroscopy. / Cannata, J. M.; Williams, J. A.; Zhou, Q. F.; Sun, L.; Shung, K. K.; Yu, H.; Kim, E. S.

In: Journal of Applied Physics, Vol. 103, No. 8, 084109, 2008.

Research output: Contribution to journalArticle

Cannata, JM, Williams, JA, Zhou, QF, Sun, L, Shung, KK, Yu, H & Kim, ES 2008, 'Self-focused ZnO transducers for ultrasonic biomicroscopy', Journal of Applied Physics, vol. 103, no. 8, 084109. https://doi.org/10.1063/1.2907716
Cannata JM, Williams JA, Zhou QF, Sun L, Shung KK, Yu H et al. Self-focused ZnO transducers for ultrasonic biomicroscopy. Journal of Applied Physics. 2008;103(8). 084109. https://doi.org/10.1063/1.2907716
Cannata, J. M. ; Williams, J. A. ; Zhou, Q. F. ; Sun, L. ; Shung, K. K. ; Yu, H. ; Kim, E. S. / Self-focused ZnO transducers for ultrasonic biomicroscopy. In: Journal of Applied Physics. 2008 ; Vol. 103, No. 8.
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