Self-focused ZnO transducers for ultrasonic biomicroscopy

J. M. Cannata, J. A. Williams, Q. Zhou, H. Yu, L. Sun, E. S. Kim, K. K. Shung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

A simple fabrication technique was developed to produce self-focused high frequency single element transducers with sputtered Zinc Oxide (ZnO) crystal films. The novelty of this technique lies in that the ZnO film can be sputtered directly onto a curved substrate. Two transducers were fabricated by sputtering an 18 μm thick ZnO layer on 2 and 3 mm diameter aluminum rods with ends shaped and polished to produce an f# equal to one. The aluminum rod served a dual purpose as the backing layer and positive electrode for the resultant transducers. A single 4 μm Parylene polymer matching layer was deposited on the transducers after housing and interconnect. The pulse-echo response for the 2 mm aperture transducer was centered at 109 MHz with a -6dB bandwidth of 43%. A 3 mm aperture transducer produced a 96 MHz echo response with a 52% bandwidth. The measured insertion loss for the 2 mm aperture was 45 dB and the 3 mm aperture was 42 dB. A wire phantom and adult zebrafish were imaged to show the capability of the transducers.

Original languageEnglish (US)
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Pages945-948
Number of pages4
DOIs
StatePublished - 2007
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: Oct 28 2007Oct 31 2007

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
Country/TerritoryUnited States
CityNew York, NY
Period10/28/0710/31/07

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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