Self-aligned lateral field excitation film acoustic resonator with very large electromechanical coupling

Wei Pang, Hongyu Yu, Jae Wan Kwon, Hao Zhang, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper describes a self-aligned lateral-field excitation (LFE) film bulk acoustic resonator (FBAR) that exhibits an electromechanical coupling coefficient (K12) of 10% at 4.1 GHz, albeit a relatively low Q of 35. The unique features of this resonator include (1) improved energy trapping structure that does not require an electrode gap close to micron and (2) a simple two-mask self-aligned fabrication process that eliminates misalignment between the piezoelectric ZnO and the metal electrode.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Frequency Control Symposium and Exposition
EditorsM.P. Yuhas
Pages558-561
Number of pages4
StatePublished - 2005
Externally publishedYes
Event2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Canada
Duration: Aug 23 2004Aug 27 2004

Other

Other2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S)
CountryCanada
CityMontreal
Period8/23/048/27/04

ASJC Scopus subject areas

  • Engineering(all)

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