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Selectively deposited Ru top electrode on Pb(Zr 0.3Ti 0.7)O 3 and Ru step coverage on TiN by digital chemical vapor deposition
Sandwip Dey, J. Goswami, S. Bhaskar, W. Cao, W. C. Noh
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations