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Selective Area Growth of Si-Ge Using Single Source Silylgermanes
John Kouvetakis
(Inventor)
Arizona State University
Research output
:
Patent
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Physics & Astronomy
p-type semiconductors
100%
metal oxide semiconductors
80%
blankets
59%
deposits
47%
CMOS
46%
controllability
30%
microstructure
30%
hole mobility
29%
microelectronics
26%
hydrides
26%
nonuniformity
25%
epitaxy
25%
photodiodes
23%
film thickness
21%
transistors
20%
field effect transistors
20%
etching
19%
saturation
18%
defects
14%
configurations
13%
performance
11%