Seeding of silicon wire growth by out-diffused metal precipitates

Vidya Ganapati, David P. Fenning, Mariana Bertoni, Chito E. Kendrick, Alexandria E. Fecych, Joan M. Redwing, Tonio Buonassisi

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Metals diffused into bulk silicon can be manipulated to out-diffuse and precipitate in microsized droplets at surfaces, allowing for subsequent silicon wire growth. This technique allows for both high-throughput and precision in the size and positions of metal droplets on the silicon surface.

Original languageEnglish (US)
Pages (from-to)563-567
Number of pages5
JournalSmall
Volume7
Issue number5
DOIs
StatePublished - Mar 7 2011
Externally publishedYes

Fingerprint

Silicon
Precipitates
Metals
Wire
Growth
Throughput

Keywords

  • bulk diffusion
  • metal catalyst
  • microwires
  • surface precipitation
  • vapor-liquid-solid method

ASJC Scopus subject areas

  • Biomaterials
  • Engineering (miscellaneous)
  • Biotechnology
  • Medicine(all)

Cite this

Ganapati, V., Fenning, D. P., Bertoni, M., Kendrick, C. E., Fecych, A. E., Redwing, J. M., & Buonassisi, T. (2011). Seeding of silicon wire growth by out-diffused metal precipitates. Small, 7(5), 563-567. https://doi.org/10.1002/smll.201002250

Seeding of silicon wire growth by out-diffused metal precipitates. / Ganapati, Vidya; Fenning, David P.; Bertoni, Mariana; Kendrick, Chito E.; Fecych, Alexandria E.; Redwing, Joan M.; Buonassisi, Tonio.

In: Small, Vol. 7, No. 5, 07.03.2011, p. 563-567.

Research output: Contribution to journalArticle

Ganapati, V, Fenning, DP, Bertoni, M, Kendrick, CE, Fecych, AE, Redwing, JM & Buonassisi, T 2011, 'Seeding of silicon wire growth by out-diffused metal precipitates', Small, vol. 7, no. 5, pp. 563-567. https://doi.org/10.1002/smll.201002250
Ganapati V, Fenning DP, Bertoni M, Kendrick CE, Fecych AE, Redwing JM et al. Seeding of silicon wire growth by out-diffused metal precipitates. Small. 2011 Mar 7;7(5):563-567. https://doi.org/10.1002/smll.201002250
Ganapati, Vidya ; Fenning, David P. ; Bertoni, Mariana ; Kendrick, Chito E. ; Fecych, Alexandria E. ; Redwing, Joan M. ; Buonassisi, Tonio. / Seeding of silicon wire growth by out-diffused metal precipitates. In: Small. 2011 ; Vol. 7, No. 5. pp. 563-567.
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