Secondary-electron production pathways determined by coincidence electron spectroscopy

M. R. Scheinfein, Jeffery Drucker, J. K. Weiss

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

The production of secondary electrons by fast (100 keV) electrons is investigated by analyzing the time coincidence between inelastically scattered incident electrons and energy-filtered secondary electrons. Thin conducting and semiconducting films show differences in both the coincidence and generation spectra at energies near the bulk-plasmon excitation, suggesting that plasmon decay does not play a central role in the production of secondary electrons in Si. At primary energy losses greater than 35 eV, the secondary-electron production rate is proportional to the energy deposited by the incident electrons.

Original languageEnglish (US)
Pages (from-to)4068-4071
Number of pages4
JournalPhysical Review B
Volume47
Issue number7
DOIs
StatePublished - 1993

ASJC Scopus subject areas

  • Condensed Matter Physics

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