Scanning confocal electron energy-loss microscopy using valence-loss signals

Huolin L. Xin, Christian Dwyer, David A. Muller, Haimei Zheng, Peter Ercius

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Finding a faster alternative to tilt-series electron tomography is critical for rapidly evolving fields such as the semiconductor industry, where failure analysis could greatly benefit from higher throughput. We present a theoretical and experimental evaluation of scanning confocal electron energy-loss microscopy (SCEELM) using valence-loss signals, which is a promising technique for the reliable reconstruction of materials with sub-10-nm resolution. Such a confocal geometry transfers information from the focused portion of the electron beam and enables rapid three-dimensional (3D) reconstruction by depth sectioning. SCEELM can minimize or eliminate the missing-information cone and the elongation problem that are associated with other depth-sectioning image techniques in a transmission electron microscope. Valence-loss SCEELM data acquisition is an order of magnitude faster and requires little postprocessing compared with tilt-series electron tomography. With postspecimen chromatic aberration (C c) correction, SCEELM signals can be acquired in parallel in the direction of energy dispersion with the aid of a physical pinhole. This increases the efficiency by 10×-100×, and can provide 3D resolved chemical information for multiple core-loss signals simultaneously.

Original languageEnglish (US)
Pages (from-to)1036-1049
Number of pages14
JournalMicroscopy and Microanalysis
Volume19
Issue number4
DOIs
StatePublished - Aug 2013
Externally publishedYes

Fingerprint

Energy dissipation
Microscopic examination
energy dissipation
electron energy
microscopy
Scanning
valence
scanning
Electrons
tomography
information transfer
failure analysis
Tomography
pinholes
elongation
data acquisition
aberration
cones
electrons
electron microscopes

Keywords

  • Aberration-corrected electron microscopy
  • Chromatic aberration correction
  • Inelastic confocal
  • Scanning confocal electron energy-loss microscopy

ASJC Scopus subject areas

  • Instrumentation

Cite this

Scanning confocal electron energy-loss microscopy using valence-loss signals. / Xin, Huolin L.; Dwyer, Christian; Muller, David A.; Zheng, Haimei; Ercius, Peter.

In: Microscopy and Microanalysis, Vol. 19, No. 4, 08.2013, p. 1036-1049.

Research output: Contribution to journalArticle

Xin, Huolin L. ; Dwyer, Christian ; Muller, David A. ; Zheng, Haimei ; Ercius, Peter. / Scanning confocal electron energy-loss microscopy using valence-loss signals. In: Microscopy and Microanalysis. 2013 ; Vol. 19, No. 4. pp. 1036-1049.
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