Metalsemiconductor field-effect transistors (MESFETs) have been fabricated using a 150-nm partially depleted silicon-on-insulator complementary metal-oxide-semiconductor (CMOS) technology. Minimum gate lengths of 150 nm have been achieved, which represents a significant reduction compared with an earlier demonstration using a 350-nm CMOS technology. The scaled MESFETs with Lg = 150 nm have a current drive that exceeds 200 mA/mm with a peak fT 35 GHz. This is considerably higher than the Lg = 400 nm MESFET with a current drive of ∼70 mA/mm and a peak fT = 10.6 GHz, which was possible with the earlier generation. However, short-channel effects become significant for Lg < 400 nm, resulting in an optimum MESFET gate length for this technology in the range of 200300 nm.

Original languageEnglish (US)
Article number5765667
Pages (from-to)1628-1634
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number6
StatePublished - Jun 1 2011



  • Metalsemiconductor field-effect transistors (MESFETs)
  • Schottky junction
  • partially depleted (PD)
  • silicon-on-insulator (SOI)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Lepkowski, W., Ghajar, M. R., Wilk, S. J., Summers, N., Thornton, T., & Fechner, P. S. (2011). Scaling SOI MESFETs to 150-nm CMOS technologies. IEEE Transactions on Electron Devices, 58(6), 1628-1634. [5765667]. https://doi.org/10.1109/TED.2011.2125965