@article{8c198e89f49041a2bfacea82fcb5cd68,
title = "Sb-mediated growth of n- and p-type AlGaAs by molecular beam epitaxy",
author = "Shane Johnson and Sadofyev, {Yu G.} and D. Ding and Yu Cao and Chaparro, {S. A.} and K. Franzreb and Yong-Hang Zhang",
year = "2004",
doi = "10.1116/1.1705579",
language = "English (US)",
volume = "22",
pages = "1436--1440",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "3",
}