Sb-mediated growth of n- and p-type AlGaAs by molecular beam epitaxy

Shane Johnson, Yu G. Sadofyev, D. Ding, Yu Cao, S. A. Chaparro, K. Franzreb, Yong-Hang Zhang

Research output: Contribution to journalArticlepeer-review

9 Scopus citations
Original languageEnglish (US)
Pages (from-to)1436-1440
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number3
StatePublished - 2004

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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