ROLE OF INTERFACES IN ULTRASMALL SEMICONDUCTOR DEVICES.

D. K. Ferry

Research output: Contribution to journalConference article

10 Scopus citations

Abstract

Devices are now controlled by strong size-related effects: coupling to the environment of contacts, interfaces/boundaries/surfaces, interconnects, and other devices. This is especially the case in MOSFET's, where remote interface phonons and surface roughness scattering dominate transport. A general treatment of device-environment interaction is discussed. Special cases for MOS transport and the specific role of interfaces are treated.

Original languageEnglish (US)
Pages (from-to)504-509
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume2
Issue number3
DOIs
StatePublished - Jan 1 1984
EventProc of the Annu Conf on the Phys and Chem of Semicond Interfaces, 11th - Pinehurst, NC, USA
Duration: Jan 31 1984Feb 2 1984

    Fingerprint

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this