Robust parameter design using generalized linear mixed models

Timothy J. Robinson, Shaun S. Wulff, Douglas Montgomery, Andre I. Khuri

Research output: Contribution to journalArticlepeer-review

42 Scopus citations

Abstract

In robust parameter design, it is often the case that the quality characteristic is nonnormal. An example in semiconductor manufacturing is resistivity, which typically follows a gamma distribution. It is also common to have models that contain, in addition to fixed polynomial effects, a random effect representing an extraneous source of variation. In this article, we demonstrate the use of generalized linear mixed models (GLMM) for situations in which the response is nonnormal and in which the noise variable is a random effect. We discuss the analysis of the random effects as well as the fixed effects in a fitted model using GLMM techniques. A numerical example from semiconductor manufacturing is provided for illustration.

Original languageEnglish (US)
Pages (from-to)65-75
Number of pages11
JournalJournal of Quality Technology
Volume38
Issue number1
DOIs
StatePublished - Jan 2006

Keywords

  • Noise variables
  • Nonnormal
  • Random effects
  • Response surface methodology
  • Robust design

ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality
  • Strategy and Management
  • Management Science and Operations Research
  • Industrial and Manufacturing Engineering

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