Fingerprint
Dive into the research topics of 'RIE passivation layer removal by remote H-plasma and H 2/SiH 4 plasma processing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
RIE passivation layer removal by remote H-plasma and H 2/SiH 4 plasma processing
Hong Ying, J. P. Barnak, Y. L. Chen, Robert Nemanich
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Scopus
citations