RIE passivation layer removal by remote H-plasma and H 2/SiH 4 plasma processing

Hong Ying, J. P. Barnak, Y. L. Chen, Robert Nemanich

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Remote H-plasma and H 2/SiH 4 plasma processes were studied as potential dry cleaning processes following reactive ion etching (RIE). The processes were compared to a process of UV/ozone followed by an HF dip. The native oxide from Si(100) substrates was removed with an RIE etch of CHF 3/Ar. The RIE process produced approx. 150angstrom of a continuous fluorocarbon (CF x) passivation layer on the Si surface. For the post-RIE-cleaning three approaches were studied and compared including (1) uv-ozone exposure followed by an HF dip, (2) remote H-plasma exposure, and (3) remote H 2/SiH 4 plasma exposure. Auger electron spectroscopy (AES) was used to investigate the surface chemical composition, and AFM was used to measure changes in surface roughness. All three processes showed substantial removal of the passivation layer. The CF x polymer was completely removed in less than 1 min for samples exposed to a 100W remote H-plasma at 15mTorr and 450°C. With the addition of approx.0.1% of SiH 4, the remote H 2/SiH 4 plasma also showed increased removal of residual oxygen contamination. The surface roughness of the plasma processed surfaces increased slightly.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages285-290
Number of pages6
Volume386
StatePublished - 1995
Externally publishedYes
EventProceedings of the 1995 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 17 1995Apr 21 1995

Other

OtherProceedings of the 1995 MRS Spring Meeting
CitySan Francisco, CA, USA
Period4/17/954/21/95

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Ying, H., Barnak, J. P., Chen, Y. L., & Nemanich, R. (1995). RIE passivation layer removal by remote H-plasma and H 2/SiH 4 plasma processing In Materials Research Society Symposium - Proceedings (Vol. 386, pp. 285-290). Materials Research Society.