We describe measurements of the electrical resistivity of micron-size crystallites of boron-doped diamond. Electron-beam lithography was employed for writing sample-specific contacts on small, well-faceted diamond crystals grown by chemical-vapor deposition on silicon substrates. After generating a three-dimensional computer model of the crystallite, a finite-element analysis was used to calculate the internal electrostatic potential distribution. Multiterminal resistance measurements, in conjunction with a computed geometrical factor, enabled the absolute resistivity to be determined. We find that the resistivities obtained from two different crystallites agree to better than 10%. The results are compared with transport measurements on a large-area homoepitaxial diamond film grown simultaneously with the crystallites. This method can be generalized to obtain electrical transport properties of other small, irregularly shaped samples.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)