Reproducible leaky tube diffusion of Cd in InP at 500°C

C. B. Wheeler, R. J. Roedel, Randall W. Nelson, Stephan N. Schauer, Peter Williams

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We report for the first time the successful application of the leaky tube method to diffuse elemental Cd into InP at 500°C. Specular surfaces are consistently realized while additional phosphorus in the ambient is not required. Free-carrier concentration profiles and junction depths were experimentally determined for times ranging from 20 min to 21/2 h. A reproducible surface concentration of ionized acceptors is ∼1×10 18 cm-3 (T=300 K). A concentration dependent diffusion coefficient ranging from approximately 1×10-14 to 1×10-10 cm2/s is calculated for the conditions under investigation. Secondary ion mass spectroscopy analysis shows the atomic Cd concentration to be very similar to that of the ionized acceptors, with the atomic surface concentration approximately two times greater than the surface hole concentration.

Original languageEnglish (US)
Pages (from-to)969-972
Number of pages4
JournalJournal of Applied Physics
Volume68
Issue number3
DOIs
StatePublished - 1990

Fingerprint

tubes
phosphorus
mass spectroscopy
diffusion coefficient
profiles
ions

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Wheeler, C. B., Roedel, R. J., Nelson, R. W., Schauer, S. N., & Williams, P. (1990). Reproducible leaky tube diffusion of Cd in InP at 500°C. Journal of Applied Physics, 68(3), 969-972. https://doi.org/10.1063/1.346662

Reproducible leaky tube diffusion of Cd in InP at 500°C. / Wheeler, C. B.; Roedel, R. J.; Nelson, Randall W.; Schauer, Stephan N.; Williams, Peter.

In: Journal of Applied Physics, Vol. 68, No. 3, 1990, p. 969-972.

Research output: Contribution to journalArticle

Wheeler, CB, Roedel, RJ, Nelson, RW, Schauer, SN & Williams, P 1990, 'Reproducible leaky tube diffusion of Cd in InP at 500°C', Journal of Applied Physics, vol. 68, no. 3, pp. 969-972. https://doi.org/10.1063/1.346662
Wheeler, C. B. ; Roedel, R. J. ; Nelson, Randall W. ; Schauer, Stephan N. ; Williams, Peter. / Reproducible leaky tube diffusion of Cd in InP at 500°C. In: Journal of Applied Physics. 1990 ; Vol. 68, No. 3. pp. 969-972.
@article{4e237cc0d5aa4cf6b6006f3128caff76,
title = "Reproducible leaky tube diffusion of Cd in InP at 500°C",
abstract = "We report for the first time the successful application of the leaky tube method to diffuse elemental Cd into InP at 500°C. Specular surfaces are consistently realized while additional phosphorus in the ambient is not required. Free-carrier concentration profiles and junction depths were experimentally determined for times ranging from 20 min to 21/2 h. A reproducible surface concentration of ionized acceptors is ∼1×10 18 cm-3 (T=300 K). A concentration dependent diffusion coefficient ranging from approximately 1×10-14 to 1×10-10 cm2/s is calculated for the conditions under investigation. Secondary ion mass spectroscopy analysis shows the atomic Cd concentration to be very similar to that of the ionized acceptors, with the atomic surface concentration approximately two times greater than the surface hole concentration.",
author = "Wheeler, {C. B.} and Roedel, {R. J.} and Nelson, {Randall W.} and Schauer, {Stephan N.} and Peter Williams",
year = "1990",
doi = "10.1063/1.346662",
language = "English (US)",
volume = "68",
pages = "969--972",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "3",

}

TY - JOUR

T1 - Reproducible leaky tube diffusion of Cd in InP at 500°C

AU - Wheeler, C. B.

AU - Roedel, R. J.

AU - Nelson, Randall W.

AU - Schauer, Stephan N.

AU - Williams, Peter

PY - 1990

Y1 - 1990

N2 - We report for the first time the successful application of the leaky tube method to diffuse elemental Cd into InP at 500°C. Specular surfaces are consistently realized while additional phosphorus in the ambient is not required. Free-carrier concentration profiles and junction depths were experimentally determined for times ranging from 20 min to 21/2 h. A reproducible surface concentration of ionized acceptors is ∼1×10 18 cm-3 (T=300 K). A concentration dependent diffusion coefficient ranging from approximately 1×10-14 to 1×10-10 cm2/s is calculated for the conditions under investigation. Secondary ion mass spectroscopy analysis shows the atomic Cd concentration to be very similar to that of the ionized acceptors, with the atomic surface concentration approximately two times greater than the surface hole concentration.

AB - We report for the first time the successful application of the leaky tube method to diffuse elemental Cd into InP at 500°C. Specular surfaces are consistently realized while additional phosphorus in the ambient is not required. Free-carrier concentration profiles and junction depths were experimentally determined for times ranging from 20 min to 21/2 h. A reproducible surface concentration of ionized acceptors is ∼1×10 18 cm-3 (T=300 K). A concentration dependent diffusion coefficient ranging from approximately 1×10-14 to 1×10-10 cm2/s is calculated for the conditions under investigation. Secondary ion mass spectroscopy analysis shows the atomic Cd concentration to be very similar to that of the ionized acceptors, with the atomic surface concentration approximately two times greater than the surface hole concentration.

UR - http://www.scopus.com/inward/record.url?scp=18744396517&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18744396517&partnerID=8YFLogxK

U2 - 10.1063/1.346662

DO - 10.1063/1.346662

M3 - Article

AN - SCOPUS:18744396517

VL - 68

SP - 969

EP - 972

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 3

ER -