Repeatability performance of non-contact probes in the 500-750GHz band

Cosan Caglayan, Georgios Trichopoulos, Kubilay Sertel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


We present the repeatability performance of an automated non-contact probe system for on-wafer device and integrated circuit characterization in the 500-750 GHz band. Unlike conventional contact-probe systems, a computer controlled x-y translation stage is employed to realize a completely automated non-contact probe setup. Thanks to this simplicity, far superior repeatability performance can be achieved with great ease. We present the repeatability study specifically for the 500-750 GHz band utilizing a precision servo system with 1 micron translation accuracy. At 625 GHz, our setup achieves 2.2° deviation in phase and 4.4% deviation in magnitude for 25 successive measurements spanning over 1.5 hours. This fully computerized non-contact probe system also facilitates intermittent re-calibrations that are normally needed for reliable sub-mmW measurements.

Original languageEnglish (US)
Title of host publication85th ARFTG Microwave Measurement Conference: Measurements and Techniques for 5G Applications, ARFTG 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479988860
StatePublished - Jul 17 2015
Externally publishedYes
Event85th ARFTG Microwave Measurement Conference, ARFTG 2015 - Phoenix, United States
Duration: May 22 2015 → …


Other85th ARFTG Microwave Measurement Conference, ARFTG 2015
CountryUnited States
Period5/22/15 → …

ASJC Scopus subject areas

  • Signal Processing
  • Computer Networks and Communications

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