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Dive into the research topics of 'Removal of SiO 2 from Si (100) by remote H 2/SiH 4 plasma prior to epitaxial growth'. Together they form a unique fingerprint.- Sort by
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J. P. Barnak, H. Ying, Y. L. Chen, J. Montgomery, Robert Nemanich
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution