Release policy governor (RPG) for re-entrant semiconductor fabrication lines

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, a method is presented for governing the release of wafers (starts) into a re-entrant semiconductor fabrication line. A flow model for a five-machine six-step re-entrant mini-fab is used to present all developments. Stabilizing clear-a-fraction (CAF) state feedback policies are developed for the mini-fab. A systematic procedure is presented for regulating the flow of starts so that critical system constraints (e.g. machine availability and buffer level constraints, etc.) are never violated, however aggressive the release policy. The regulation is achieved via nonlinear optimization based on state information from the flow model. The resulting algorithm, called a release policy governor (RPG), is shown to produce a closed loop stable system.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Conference on Decision and Control
PublisherIEEE
Pages72-77
Number of pages6
Volume1
StatePublished - 1997
EventProceedings of the 1997 36th IEEE Conference on Decision and Control. Part 1 (of 5) - San Diego, CA, USA
Duration: Dec 10 1997Dec 12 1997

Other

OtherProceedings of the 1997 36th IEEE Conference on Decision and Control. Part 1 (of 5)
CitySan Diego, CA, USA
Period12/10/9712/12/97

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

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