Relationships among equivalent oxide thickness, nanochemistry, and nanostructure in atomic layer chemical-vapor-deposited Hf-O films on Si

Sandwip Dey, A. Das, M. Tsai, D. Gu, M. Floyd, Ray Carpenter, H. De Waard, C. Werkhoven, S. Marcus

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

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Physics & Astronomy