Reflection high-energy electron diffraction during substrate rotation: A new dimension for in situ characterization

W. Braun, H. Möller, Yong-Hang Zhang

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

We present two methods to access reciprocal space with reflection high-energy electron diffraction (RHEED) during substrate rotation. The extraction of an arbitrary number of still frames from a continuously changing RHEED pattern is realized by triggering the substrate rotation and it allows analysis of quasistatic RHEED patterns that are updated every revolution. At the same time, the intensity along a line parallel to the shadow edge can be used to reconstruct a planar cut through the reciprocal lattice similar to a low-energy electron diffraction pattern. This RHEED pattern directly reveals the symmetry of the surface reconstruction and its changes during the deposition process.

Original languageEnglish (US)
Pages (from-to)1507-1510
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume16
Issue number3
DOIs
StatePublished - 1998

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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