@article{ee31889b4a584c19ad38033f4208557f,
title = "Recent developments in modelling and analysis of semiconductor manufacturing",
author = "Peter Lendermann and John Fowler and Min Xie",
note = "Copyright: Copyright 2007 Elsevier B.V., All rights reserved.",
year = "2007",
month = feb,
doi = "10.1080/00207540600792572",
language = "English (US)",
volume = "45",
pages = "485--486",
journal = "International Journal of Production Research",
issn = "0020-7543",
publisher = "Taylor and Francis Ltd.",
number = "3",
}