Real-time ozone detection based on a microfabricated quartz crystal tuning fork sensor

Rui Wang; Francis Tsow; Xuezhi Zhang; Jhih Hong Peng; Erica Forzani; Yongsheng Chen; Ohn C. Crittenden; Hugo Destaillats; Nongjian Tao

doi:10.3390/s90705655

Real-time ozone detection based on a microfabricated quartz crystal tuning fork sensor

Rui Wang, Francis Tsow, Xuezhi Zhang, Jhih Hong Peng, Erica Forzani, Yongsheng Chen, Ohn C. Crittenden, Hugo Destaillats, Nongjian Tao

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ~2 pg/mm² and response time of 1 second, the sensor coated with a polymer sensing material can detect ppb-level ozone in air. The sensor is integrated into a miniaturized wearable device containing a detection circuit, filtration, battery and wireless communication chip, which is ideal for personal and microenvironmental chemical exposure monitoring.

Original language	English (US)
Pages (from-to)	5655-5663
Number of pages	9
Journal	Sensors
Volume	9
Issue number	7
DOIs	https://doi.org/10.3390/s90705655
State	Published - Jul 2009

Keywords

Environmental
Epidemiological
Ozone
Population
Real-time
Selective
Sensitive
Sensor
Wearable
Wireless

ASJC Scopus subject areas

Analytical Chemistry
Information Systems
Biochemistry
Atomic and Molecular Physics, and Optics
Instrumentation
Electrical and Electronic Engineering

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10.3390/s90705655

Cite this

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abstract = "A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ~2 pg/mm2 and response time of 1 second, the sensor coated with a polymer sensing material can detect ppb-level ozone in air. The sensor is integrated into a miniaturized wearable device containing a detection circuit, filtration, battery and wireless communication chip, which is ideal for personal and microenvironmental chemical exposure monitoring.",

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AU - Wang, Rui

AU - Tsow, Francis

AU - Zhang, Xuezhi

AU - Peng, Jhih Hong

AU - Forzani, Erica

AU - Chen, Yongsheng

AU - Crittenden, Ohn C.

AU - Destaillats, Hugo

AU - Tao, Nongjian

PY - 2009/7

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KW - Environmental

KW - Epidemiological

KW - Ozone

KW - Population

KW - Real-time

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KW - Wearable

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Real-time ozone detection based on a microfabricated quartz crystal tuning fork sensor

Abstract

Keywords

ASJC Scopus subject areas

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