Real-time observation of Pt-Si micro-droplet migration by photo-electron emission microscopy

W. Yang, H. Ade, Robert Nemanich

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The formation and dynamics of Pt-Si liquid droplets on Si (001) substrates have been investigated by Photo-electron Emission Microscopy (PEEM). After ambient deposition of a 10nm Pt film, a uniform PtSi layer was transformed into an island structure at approx. 800°C. The PtSi islands of micrometer size began to melt and were transformed into molten Pt-Si alloy islands below the melting point of PtSi. At approx. 1100°C surface migration of the micro-droplets was observed. The moving droplets coalesced with nearby islands and grew in size. The motion was related to the temperature difference across the substrate, and droplet migration was observed from the cold to the hot regions of the surface. The migration velocity was measured as a function of temperature and droplet size. The driving force for migration is related to material diffusion, equilibrium at the solid-liquid interfaces, and surface energetics.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages201-206
Number of pages6
Volume584
StatePublished - 2000
Externally publishedYes
EventMaterial Issues and Modeling for Device Nanofabrication - Boston, MA, USA
Duration: Nov 29 1999Dec 2 1999

Other

OtherMaterial Issues and Modeling for Device Nanofabrication
CityBoston, MA, USA
Period11/29/9912/2/99

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Yang, W., Ade, H., & Nemanich, R. (2000). Real-time observation of Pt-Si micro-droplet migration by photo-electron emission microscopy. In Materials Research Society Symposium - Proceedings (Vol. 584, pp. 201-206). Materials Research Society.