Abstract
In epitaxial growth, the sensitivity of material properties to growth temperature means that an accurate and reliable method for measuring substrate temperature is critical. The band edge thermometry is a proven technique for the real-time control of substrate temperature.
| Original language | English (US) |
|---|---|
| Title of host publication | LEOS Summer Topical Meeting |
| Publisher | IEEE |
| Pages | 47-48 |
| Number of pages | 2 |
| State | Published - 2000 |
| Event | 2000 IEEE/LEOS Summer Topical Meeting - Aventura, FL, USA Duration: Jul 24 2000 → Jul 28 2000 |
Other
| Other | 2000 IEEE/LEOS Summer Topical Meeting |
|---|---|
| City | Aventura, FL, USA |
| Period | 7/24/00 → 7/28/00 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics
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Cite this
Johnson, S., Beaudoin, M., Boonzaayer, M., Grassi, E., & Zhang, Y-H. (2000). Real-time control of substrate temperature using band edge thermometry. In LEOS Summer Topical Meeting (pp. 47-48). IEEE.