Abstract
In epitaxial growth, the sensitivity of material properties to growth temperature means that an accurate and reliable method for measuring substrate temperature is critical. The band edge thermometry is a proven technique for the real-time control of substrate temperature.
Original language | English (US) |
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Title of host publication | LEOS Summer Topical Meeting |
Publisher | IEEE |
Pages | 47-48 |
Number of pages | 2 |
State | Published - 2000 |
Event | 2000 IEEE/LEOS Summer Topical Meeting - Aventura, FL, USA Duration: Jul 24 2000 → Jul 28 2000 |
Other
Other | 2000 IEEE/LEOS Summer Topical Meeting |
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City | Aventura, FL, USA |
Period | 7/24/00 → 7/28/00 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics