Real-time control of substrate temperature using band edge thermometry

Shane Johnson, M. Beaudoin, M. Boonzaayer, E. Grassi, Yong-Hang Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In epitaxial growth, the sensitivity of material properties to growth temperature means that an accurate and reliable method for measuring substrate temperature is critical. The band edge thermometry is a proven technique for the real-time control of substrate temperature.

Original languageEnglish (US)
Title of host publicationLEOS Summer Topical Meeting
PublisherIEEE
Pages47-48
Number of pages2
StatePublished - 2000
Event2000 IEEE/LEOS Summer Topical Meeting - Aventura, FL, USA
Duration: Jul 24 2000 → Jul 28 2000

Other

Other2000 IEEE/LEOS Summer Topical Meeting
CityAventura, FL, USA
Period7/24/00 → 7/28/00

Fingerprint

Real time control
temperature measurement
Growth temperature
Substrates
Epitaxial growth
Materials properties
critical temperature
Temperature
temperature
sensitivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Johnson, S., Beaudoin, M., Boonzaayer, M., Grassi, E., & Zhang, Y-H. (2000). Real-time control of substrate temperature using band edge thermometry. In LEOS Summer Topical Meeting (pp. 47-48). IEEE.

Real-time control of substrate temperature using band edge thermometry. / Johnson, Shane; Beaudoin, M.; Boonzaayer, M.; Grassi, E.; Zhang, Yong-Hang.

LEOS Summer Topical Meeting. IEEE, 2000. p. 47-48.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Johnson, S, Beaudoin, M, Boonzaayer, M, Grassi, E & Zhang, Y-H 2000, Real-time control of substrate temperature using band edge thermometry. in LEOS Summer Topical Meeting. IEEE, pp. 47-48, 2000 IEEE/LEOS Summer Topical Meeting, Aventura, FL, USA, 7/24/00.
Johnson S, Beaudoin M, Boonzaayer M, Grassi E, Zhang Y-H. Real-time control of substrate temperature using band edge thermometry. In LEOS Summer Topical Meeting. IEEE. 2000. p. 47-48
Johnson, Shane ; Beaudoin, M. ; Boonzaayer, M. ; Grassi, E. ; Zhang, Yong-Hang. / Real-time control of substrate temperature using band edge thermometry. LEOS Summer Topical Meeting. IEEE, 2000. pp. 47-48
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