Real-time control of multiproduct bulk-service semiconductor manufacturing processes

John Fowler, Don T. Phillips, Gary L. Hogg

Research output: Contribution to journalArticle

96 Citations (Scopus)

Abstract

This work demonstrates how knowledge of future arrivals can be used to improve control of multiproduct bulk-service semiconductor manufacturing processes. The objective of the research reported is to reduce the average time that lots spend waiting to be processed. A review of the current literature reveals that several researchers have dealt with the control of bulk-service queuing systems; however, only one paper has addressed the use of knowledge of future arrivals and it only considered the single-product case. This research reexamines the single-product-single-tube case and then explores the multiple-products-single tube case. For both cases, a control strategy is devised and evaluated through the use of systems simulation. The steady-state performance of each control strategy is then compared to the steady-state performance of the theoretically optimal control strategy not considering the timing of any future arrivals (i.e., a minimum batch size strategy). The experimental results indicate that the control strategies developed in this work perform well under a wide variety of conditions.

Original languageEnglish (US)
Pages (from-to)158-163
Number of pages6
JournalIEEE Transactions on Semiconductor Manufacturing
Volume5
Issue number2
DOIs
StatePublished - May 1992
Externally publishedYes

Fingerprint

Real time control
manufacturing
Semiconductor materials
arrivals
products
tubes
systems simulation
optimal control
time measurement

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Real-time control of multiproduct bulk-service semiconductor manufacturing processes. / Fowler, John; Phillips, Don T.; Hogg, Gary L.

In: IEEE Transactions on Semiconductor Manufacturing, Vol. 5, No. 2, 05.1992, p. 158-163.

Research output: Contribution to journalArticle

@article{caeed6c7ec8e46698fc86256335e54cf,
title = "Real-time control of multiproduct bulk-service semiconductor manufacturing processes",
abstract = "This work demonstrates how knowledge of future arrivals can be used to improve control of multiproduct bulk-service semiconductor manufacturing processes. The objective of the research reported is to reduce the average time that lots spend waiting to be processed. A review of the current literature reveals that several researchers have dealt with the control of bulk-service queuing systems; however, only one paper has addressed the use of knowledge of future arrivals and it only considered the single-product case. This research reexamines the single-product-single-tube case and then explores the multiple-products-single tube case. For both cases, a control strategy is devised and evaluated through the use of systems simulation. The steady-state performance of each control strategy is then compared to the steady-state performance of the theoretically optimal control strategy not considering the timing of any future arrivals (i.e., a minimum batch size strategy). The experimental results indicate that the control strategies developed in this work perform well under a wide variety of conditions.",
author = "John Fowler and Phillips, {Don T.} and Hogg, {Gary L.}",
year = "1992",
month = "5",
doi = "10.1109/66.136278",
language = "English (US)",
volume = "5",
pages = "158--163",
journal = "IEEE Transactions on Semiconductor Manufacturing",
issn = "0894-6507",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",

}

TY - JOUR

T1 - Real-time control of multiproduct bulk-service semiconductor manufacturing processes

AU - Fowler, John

AU - Phillips, Don T.

AU - Hogg, Gary L.

PY - 1992/5

Y1 - 1992/5

N2 - This work demonstrates how knowledge of future arrivals can be used to improve control of multiproduct bulk-service semiconductor manufacturing processes. The objective of the research reported is to reduce the average time that lots spend waiting to be processed. A review of the current literature reveals that several researchers have dealt with the control of bulk-service queuing systems; however, only one paper has addressed the use of knowledge of future arrivals and it only considered the single-product case. This research reexamines the single-product-single-tube case and then explores the multiple-products-single tube case. For both cases, a control strategy is devised and evaluated through the use of systems simulation. The steady-state performance of each control strategy is then compared to the steady-state performance of the theoretically optimal control strategy not considering the timing of any future arrivals (i.e., a minimum batch size strategy). The experimental results indicate that the control strategies developed in this work perform well under a wide variety of conditions.

AB - This work demonstrates how knowledge of future arrivals can be used to improve control of multiproduct bulk-service semiconductor manufacturing processes. The objective of the research reported is to reduce the average time that lots spend waiting to be processed. A review of the current literature reveals that several researchers have dealt with the control of bulk-service queuing systems; however, only one paper has addressed the use of knowledge of future arrivals and it only considered the single-product case. This research reexamines the single-product-single-tube case and then explores the multiple-products-single tube case. For both cases, a control strategy is devised and evaluated through the use of systems simulation. The steady-state performance of each control strategy is then compared to the steady-state performance of the theoretically optimal control strategy not considering the timing of any future arrivals (i.e., a minimum batch size strategy). The experimental results indicate that the control strategies developed in this work perform well under a wide variety of conditions.

UR - http://www.scopus.com/inward/record.url?scp=0026866908&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026866908&partnerID=8YFLogxK

U2 - 10.1109/66.136278

DO - 10.1109/66.136278

M3 - Article

AN - SCOPUS:0026866908

VL - 5

SP - 158

EP - 163

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

SN - 0894-6507

IS - 2

ER -