The acquisition and parameterization of a fully dynamic optical constant (OC) database is presented and its use in the real-time composition control of InAlAs grown on InP. The OC database is valid for 0.490≤x≤0.540 and 439 °C≤T growth ≤513 °C and is corrected for window birefringence. This is accomplished by acquiring spectroscopic ellipsometry (SE) data from growing films of different compositions, while the temperature is controlled using feedback from band-gap thermometry. The database is used in a feedback loop to control the composition of InAlAs films to ±0.002 in standard deviation or ±0.003 maximum deviation from the target composition.
|Original language||English (US)|
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - May 2000|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering