Real-time composition control of InAlAs grown on InP using spectroscopic ellipsometry

M. Beaudoin; E. Grassi; Shane Johnson; K. Ramaswamy; Konstantinos Tsakalis; Terry Alford; Yong-Hang Zhang

doi:10.1116/1.591398

Real-time composition control of InAlAs grown on InP using spectroscopic ellipsometry

M. Beaudoin, E. Grassi, Shane Johnson, K. Ramaswamy, Konstantinos Tsakalis, Terry Alford, Yong-Hang Zhang

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The acquisition and parameterization of a fully dynamic optical constant (OC) database is presented and its use in the real-time composition control of InAlAs grown on InP. The OC database is valid for 0.490≤x≤0.540 and 439 °C≤T growth ≤513 °C and is corrected for window birefringence. This is accomplished by acquiring spectroscopic ellipsometry (SE) data from growing films of different compositions, while the temperature is controlled using feedback from band-gap thermometry. The database is used in a feedback loop to control the composition of InAlAs films to ±0.002 in standard deviation or ±0.003 maximum deviation from the target composition.

Original language	English (US)
Pages (from-to)	1435-1438
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	3
DOIs	https://doi.org/10.1116/1.591398
State	Published - May 2000

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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abstract = "The acquisition and parameterization of a fully dynamic optical constant (OC) database is presented and its use in the real-time composition control of InAlAs grown on InP. The OC database is valid for 0.490≤x≤0.540 and 439 °C≤T growth ≤513 °C and is corrected for window birefringence. This is accomplished by acquiring spectroscopic ellipsometry (SE) data from growing films of different compositions, while the temperature is controlled using feedback from band-gap thermometry. The database is used in a feedback loop to control the composition of InAlAs films to ±0.002 in standard deviation or ±0.003 maximum deviation from the target composition.",

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AU - Beaudoin, M.

AU - Grassi, E.

AU - Johnson, Shane

AU - Ramaswamy, K.

AU - Tsakalis, Konstantinos

AU - Alford, Terry

AU - Zhang, Yong-Hang

PY - 2000/5

Y1 - 2000/5

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AB - The acquisition and parameterization of a fully dynamic optical constant (OC) database is presented and its use in the real-time composition control of InAlAs grown on InP. The OC database is valid for 0.490≤x≤0.540 and 439 °C≤T growth ≤513 °C and is corrected for window birefringence. This is accomplished by acquiring spectroscopic ellipsometry (SE) data from growing films of different compositions, while the temperature is controlled using feedback from band-gap thermometry. The database is used in a feedback loop to control the composition of InAlAs films to ±0.002 in standard deviation or ±0.003 maximum deviation from the target composition.

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Real-time composition control of InAlAs grown on InP using spectroscopic ellipsometry

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