Real-time composition control of InAlAs grown on InP using spectroscopic ellipsometry

M. Beaudoin, E. Grassi, Shane Johnson, K. Ramaswamy, Konstantinos Tsakalis, Terry Alford, Yong-Hang Zhang

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

The acquisition and parameterization of a fully dynamic optical constant (OC) database is presented and its use in the real-time composition control of InAlAs grown on InP. The OC database is valid for 0.490≤x≤0.540 and 439 °C≤T growth ≤513 °C and is corrected for window birefringence. This is accomplished by acquiring spectroscopic ellipsometry (SE) data from growing films of different compositions, while the temperature is controlled using feedback from band-gap thermometry. The database is used in a feedback loop to control the composition of InAlAs films to ±0.002 in standard deviation or ±0.003 maximum deviation from the target composition.

Original languageEnglish (US)
Pages (from-to)1435-1438
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number3
DOIs
StatePublished - May 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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