RandD of diamond films in the Frontier Carbon Technology Project and related topics

Koji Kobashi, Yoshiki Nishibayashi, Yoshihiro Yokota, Yutaka Ando, Takeshi Tachibana, Nobuyuki Kawakami, Kazushi Hayashi, Kenichi Inoue, Kiichi Meguro, Hiroshi Imai, Hiroshi Furuta, Takashi Hirao, Kenjiro Oura, Yasuhito Gotoh, Hironori Nakahara, Hiroshi Tsuji, Junzo Ishikawa, Franz A. Koeck, Robert Nemanich, Tadashi Sakai & 2 others Naoshi Sakuma, Hiroaki Yoshida

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

R&D activities on diamond chemical vapor deposition (CVD) and field emission in the Frontier Carbon Technology Project are presented. The topics are (1) morphology control of diamond films grown by a 60-kW, 915-MHz microwave plasma CVD reactor, (2) growth technology of large single crystal diamond with a low density of defects, (3) heteroepitaxial growth technology of diamond films on Pt, (4) fabrication of sharp emitter tips on single crystal diamond, (5) field emission study from diamond particles, and (6) intense field emission from ion implanted homoepitaxial diamond layer. Research results of field emission obtained by Kyoto University and North Carolina State University are also described.

Original languageEnglish (US)
Pages (from-to)233-240
Number of pages8
JournalDiamond and Related Materials
Volume12
Issue number3-7
DOIs
StatePublished - Mar 2003
Externally publishedYes

Fingerprint

Diamond
Diamond films
diamond films
Diamonds
Carbon
Field emission
diamonds
field emission
carbon
Chemical vapor deposition
Single crystals
vapor deposition
single crystals
Epitaxial growth
emitters
reactors
Microwaves
Ions
Plasmas
microwaves

Keywords

  • Chemical vapor deposition
  • Diamond films
  • Etching
  • Field emission

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Kobashi, K., Nishibayashi, Y., Yokota, Y., Ando, Y., Tachibana, T., Kawakami, N., ... Yoshida, H. (2003). RandD of diamond films in the Frontier Carbon Technology Project and related topics. Diamond and Related Materials, 12(3-7), 233-240. https://doi.org/10.1016/S0925-9635(02)00298-4

RandD of diamond films in the Frontier Carbon Technology Project and related topics. / Kobashi, Koji; Nishibayashi, Yoshiki; Yokota, Yoshihiro; Ando, Yutaka; Tachibana, Takeshi; Kawakami, Nobuyuki; Hayashi, Kazushi; Inoue, Kenichi; Meguro, Kiichi; Imai, Hiroshi; Furuta, Hiroshi; Hirao, Takashi; Oura, Kenjiro; Gotoh, Yasuhito; Nakahara, Hironori; Tsuji, Hiroshi; Ishikawa, Junzo; Koeck, Franz A.; Nemanich, Robert; Sakai, Tadashi; Sakuma, Naoshi; Yoshida, Hiroaki.

In: Diamond and Related Materials, Vol. 12, No. 3-7, 03.2003, p. 233-240.

Research output: Contribution to journalArticle

Kobashi, K, Nishibayashi, Y, Yokota, Y, Ando, Y, Tachibana, T, Kawakami, N, Hayashi, K, Inoue, K, Meguro, K, Imai, H, Furuta, H, Hirao, T, Oura, K, Gotoh, Y, Nakahara, H, Tsuji, H, Ishikawa, J, Koeck, FA, Nemanich, R, Sakai, T, Sakuma, N & Yoshida, H 2003, 'RandD of diamond films in the Frontier Carbon Technology Project and related topics', Diamond and Related Materials, vol. 12, no. 3-7, pp. 233-240. https://doi.org/10.1016/S0925-9635(02)00298-4
Kobashi K, Nishibayashi Y, Yokota Y, Ando Y, Tachibana T, Kawakami N et al. RandD of diamond films in the Frontier Carbon Technology Project and related topics. Diamond and Related Materials. 2003 Mar;12(3-7):233-240. https://doi.org/10.1016/S0925-9635(02)00298-4
Kobashi, Koji ; Nishibayashi, Yoshiki ; Yokota, Yoshihiro ; Ando, Yutaka ; Tachibana, Takeshi ; Kawakami, Nobuyuki ; Hayashi, Kazushi ; Inoue, Kenichi ; Meguro, Kiichi ; Imai, Hiroshi ; Furuta, Hiroshi ; Hirao, Takashi ; Oura, Kenjiro ; Gotoh, Yasuhito ; Nakahara, Hironori ; Tsuji, Hiroshi ; Ishikawa, Junzo ; Koeck, Franz A. ; Nemanich, Robert ; Sakai, Tadashi ; Sakuma, Naoshi ; Yoshida, Hiroaki. / RandD of diamond films in the Frontier Carbon Technology Project and related topics. In: Diamond and Related Materials. 2003 ; Vol. 12, No. 3-7. pp. 233-240.
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