Raman scattering from microcrystalline Si films

Considerations of composite structures with different optical absorption properties

Robert Nemanich, E. C. Buehler, Y. M. Legrice, R. E. Shroder, G. N. Parsons, C. Wang, C. Lucovsky, J. B. Boyce

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.

Original languageEnglish (US)
Pages (from-to)813-815
Number of pages3
JournalJournal of Non-Crystalline Solids
Volume114
Issue numberPART 2
DOIs
StatePublished - Dec 2 1989
Externally publishedYes

Fingerprint

composite structures
Composite structures
Light absorption
Raman scattering
optical absorption
Raman spectra
Microcrystalline silicon
Excimer lasers
Magnetron sputtering
Crystalline materials
excimer lasers
magnetron sputtering
Composite materials
composite materials
silicon
excitation

ASJC Scopus subject areas

  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

Cite this

Raman scattering from microcrystalline Si films : Considerations of composite structures with different optical absorption properties. / Nemanich, Robert; Buehler, E. C.; Legrice, Y. M.; Shroder, R. E.; Parsons, G. N.; Wang, C.; Lucovsky, C.; Boyce, J. B.

In: Journal of Non-Crystalline Solids, Vol. 114, No. PART 2, 02.12.1989, p. 813-815.

Research output: Contribution to journalArticle

Nemanich, Robert ; Buehler, E. C. ; Legrice, Y. M. ; Shroder, R. E. ; Parsons, G. N. ; Wang, C. ; Lucovsky, C. ; Boyce, J. B. / Raman scattering from microcrystalline Si films : Considerations of composite structures with different optical absorption properties. In: Journal of Non-Crystalline Solids. 1989 ; Vol. 114, No. PART 2. pp. 813-815.
@article{e7488562e6984065837b6ffbd89af8c7,
title = "Raman scattering from microcrystalline Si films: Considerations of composite structures with different optical absorption properties",
abstract = "Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.",
author = "Robert Nemanich and Buehler, {E. C.} and Legrice, {Y. M.} and Shroder, {R. E.} and Parsons, {G. N.} and C. Wang and C. Lucovsky and Boyce, {J. B.}",
year = "1989",
month = "12",
day = "2",
doi = "10.1016/0022-3093(89)90729-1",
language = "English (US)",
volume = "114",
pages = "813--815",
journal = "Journal of Non-Crystalline Solids",
issn = "0022-3093",
publisher = "Elsevier",
number = "PART 2",

}

TY - JOUR

T1 - Raman scattering from microcrystalline Si films

T2 - Considerations of composite structures with different optical absorption properties

AU - Nemanich, Robert

AU - Buehler, E. C.

AU - Legrice, Y. M.

AU - Shroder, R. E.

AU - Parsons, G. N.

AU - Wang, C.

AU - Lucovsky, C.

AU - Boyce, J. B.

PY - 1989/12/2

Y1 - 1989/12/2

N2 - Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.

AB - Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.

UR - http://www.scopus.com/inward/record.url?scp=0024807723&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024807723&partnerID=8YFLogxK

U2 - 10.1016/0022-3093(89)90729-1

DO - 10.1016/0022-3093(89)90729-1

M3 - Article

VL - 114

SP - 813

EP - 815

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

SN - 0022-3093

IS - PART 2

ER -