Raman scattering characterization of carbon bonding in diamond and diamondlike thin films

R. J. Nemanich, J. T. Glass, G. Lucovsky, R. E. Shroder

Research output: Contribution to journalArticle

662 Scopus citations

Abstract

The atomic bonding configurations of carbon bonding in diamond and diamondlike thin films are explored using Raman scattering. The general aspects of Raman scattering from composites are presented. Effects are discussed due to crystalline or amorphous structures, large versus microcrystalline domains, and strong optical absorption and transparent regions. The Raman scattering from diamondlike films shows several features which are attributed to microcrystalline graphitelike structures which all originate from the same region in the sample. In contrast, the spectra of diamond films show features attributed to different components of a composite film. Components identified are crystalline diamond, and disordered and microcrystalline graphitic structures. The presence of precursor microcrystalline or amorphous diamond structures is also suggested.

Original languageEnglish (US)
Pages (from-to)1783-1787
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume6
Issue number3
DOIs
StatePublished - May 1988
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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