Quantitative SIMS analysis of hydrogenated amorphous silicon using superimposed deuterium implant standards

Peter Williams, Katherine M. Stika, John A. Davies, Thomas E. Jackman

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Fingerprint

Dive into the research topics of 'Quantitative SIMS analysis of hydrogenated amorphous silicon using superimposed deuterium implant standards'. Together they form a unique fingerprint.

Engineering & Materials Science