Quantitative position-averaged K-, L-, and M-shell core-loss scattering in STEM

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Abstract

We present a quantitative comparison between experimental position-averaged core-loss scattering from K-, L-, and M-shells of various elements and simulations based on a single-particle description of the core-loss process. To facilitate a direct comparison free of adjustable or compensating parameters, we compare absolute scattering cross-sections for zone-axis-aligned crystals whose thicknesses have been measured independently. The results show that the single-particle model accurately predicts the absolute scattering intensity from K-shells, and L-shells in some cases, but achieves only semi-quantitative agreement for M-shells.

Original languageEnglish (US)
Pages (from-to)1070-1077
Number of pages8
JournalMicroscopy and Microanalysis
Volume20
Issue number4
DOIs
StatePublished - Aug 2014
Externally publishedYes

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Keywords

  • core-loss cross-section
  • double channeling
  • multislice simulation
  • quantitative STEM
  • quantitative spectroscopy

ASJC Scopus subject areas

  • Instrumentation

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