Quantitative analysis of a-Si1-xCx: H thin films by vibrational spectroscopy and nuclear methods

D. Gracin; I. Bogdanović; V. Borjanović; M. Jakšić; Ž Pastuović; J. M. Dutta; B. Vlahović; R. J. Nemanich

doi:10.1016/s0042-207x(01)00134-8

Quantitative analysis of a-Si_1-xC_x: H thin films by vibrational spectroscopy and nuclear methods

D. Gracin, I. Bogdanović, V. Borjanović, M. Jakšić, Ž Pastuović, J. M. Dutta, B. Vlahović, R. J. Nemanich

Research output: Contribution to journal › Conference article › peer-review

16 Scopus citations

Abstract

Thin amorphous hydrogenated silicon-carbon films, a-Si_1-xC_x : H were deposited by magnetron sputtering on glass and mono-crystalline substrates with carbon content from x = 0.2 to 1, wide variation of hydrogen concentration and different degrees of structural ordering. The obtained films were investigated by Fourier transform infra-red (FTIR) spectroscopy, Raman spectroscopy, Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). The results of the quantitative analyses obtained by the above-mentioned techniques were compared. It has been concluded that the applied vibrational methods can be used quantitatively which enables estimation of the degree of chemical ordering in the analysed samples.

Original language	English (US)
Pages (from-to)	303-308
Number of pages	6
Journal	Vacuum
Volume	61
Issue number	2-4
DOIs	https://doi.org/10.1016/s0042-207x(01)00134-8
State	Published - May 14 2001
Externally published	Yes
Event	8th Joint Vaccum Conference of Croatia, Austria, Slovenia, Hungary - Pule, Croatia Duration: Jun 4 2000 → Jun 9 2000

Keywords

Amorphous silicon carbide
ERDA
FTIR
Quantitative analysis
RBS
Raman

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

Access to Document

10.1016/s0042-207x(01)00134-8

Cite this

@article{71af850ff75a4e069535ef47980d08f2,

title = "Quantitative analysis of a-Si1-xCx: H thin films by vibrational spectroscopy and nuclear methods",

abstract = "Thin amorphous hydrogenated silicon-carbon films, a-Si1-xCx : H were deposited by magnetron sputtering on glass and mono-crystalline substrates with carbon content from x = 0.2 to 1, wide variation of hydrogen concentration and different degrees of structural ordering. The obtained films were investigated by Fourier transform infra-red (FTIR) spectroscopy, Raman spectroscopy, Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). The results of the quantitative analyses obtained by the above-mentioned techniques were compared. It has been concluded that the applied vibrational methods can be used quantitatively which enables estimation of the degree of chemical ordering in the analysed samples.",

keywords = "Amorphous silicon carbide, ERDA, FTIR, Quantitative analysis, RBS, Raman",

author = "D. Gracin and I. Bogdanovi{\'c} and V. Borjanovi{\'c} and M. Jak{\v s}i{\'c} and {\v Z} Pastuovi{\'c} and Dutta, {J. M.} and B. Vlahovi{\'c} and Nemanich, {R. J.}",

note = "Funding Information: This work was partially supported by the NREL subcontract No. AAK-9-18675-03. ; 8th Joint Vaccum Conference of Croatia, Austria, Slovenia, Hungary ; Conference date: 04-06-2000 Through 09-06-2000",

year = "2001",

month = may,

day = "14",

doi = "10.1016/s0042-207x(01)00134-8",

language = "English (US)",

volume = "61",

pages = "303--308",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Limited",

number = "2-4",

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TY - JOUR

T1 - Quantitative analysis of a-Si1-xCx

T2 - 8th Joint Vaccum Conference of Croatia, Austria, Slovenia, Hungary

AU - Gracin, D.

AU - Bogdanović, I.

AU - Borjanović, V.

AU - Jakšić, M.

AU - Pastuović, Ž

AU - Dutta, J. M.

AU - Vlahović, B.

AU - Nemanich, R. J.

N1 - Funding Information: This work was partially supported by the NREL subcontract No. AAK-9-18675-03.

PY - 2001/5/14

Y1 - 2001/5/14

N2 - Thin amorphous hydrogenated silicon-carbon films, a-Si1-xCx : H were deposited by magnetron sputtering on glass and mono-crystalline substrates with carbon content from x = 0.2 to 1, wide variation of hydrogen concentration and different degrees of structural ordering. The obtained films were investigated by Fourier transform infra-red (FTIR) spectroscopy, Raman spectroscopy, Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). The results of the quantitative analyses obtained by the above-mentioned techniques were compared. It has been concluded that the applied vibrational methods can be used quantitatively which enables estimation of the degree of chemical ordering in the analysed samples.

AB - Thin amorphous hydrogenated silicon-carbon films, a-Si1-xCx : H were deposited by magnetron sputtering on glass and mono-crystalline substrates with carbon content from x = 0.2 to 1, wide variation of hydrogen concentration and different degrees of structural ordering. The obtained films were investigated by Fourier transform infra-red (FTIR) spectroscopy, Raman spectroscopy, Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). The results of the quantitative analyses obtained by the above-mentioned techniques were compared. It has been concluded that the applied vibrational methods can be used quantitatively which enables estimation of the degree of chemical ordering in the analysed samples.

KW - Amorphous silicon carbide

KW - ERDA

KW - FTIR

KW - Quantitative analysis

KW - RBS

KW - Raman

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U2 - 10.1016/s0042-207x(01)00134-8

DO - 10.1016/s0042-207x(01)00134-8

M3 - Conference article

AN - SCOPUS:0035858437

SN - 0042-207X

VL - 61

SP - 303

EP - 308

JO - Vacuum

JF - Vacuum

IS - 2-4

Y2 - 4 June 2000 through 9 June 2000

ER -