Quantitative analysis of 2-D electrostatic potential distributions in 90-nm Si pMOSFETs using off-axis electron holography

Myung Geun Han, Peter Fejes, Qianghua Xie, Sandeep Bagchi, Bill Taylor, James Conner, Martha McCartney

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science