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PROPERTIES OF ION IMPLANTED POLYSILICON LAYERS SUBJECTED TO RAPID THERMAL ANNEALING.
S. R. Wilson, W. M. Paulson, R. B. Gregory, Stephen Krause, J. D. Gressett, F. D. McDaniel, R. G. Downing
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Scopus
citations