Abstract
Pressure sensors are one of the earliest and most successfully commercialized microdevices that provide sensing solutions spanning consumer, industrial, and biomedical applications. This chapter covers the developmental history as well as the state of the art in micromachined pressure sensor technology. Discussions span from device fabrication to system level implementation within the chapter sections of device design, transducer technologies, and applications. Details of device design cover fundamental diaphragm mechanics as well as the impact of second-order non-linear effects. Sensor implementations that utilize piezo-resistive, piezo-electric, capacitive, thermal, optical and resonant techniques are discussed covering the various transducer technologies as well as their fundamental mechanisms. At the application level, the chapter covers device packaging, sensor interface circuitry, sensor calibration and compensation, as well as wireless system implementation.
| Original language | English (US) |
|---|---|
| Title of host publication | Comprehensive Microsystems |
| Publisher | Elsevier |
| Pages | 101-133 |
| Number of pages | 33 |
| Volume | 2 |
| ISBN (Print) | 9780444521903 |
| DOIs | |
| State | Published - Jan 1 2007 |
Keywords
- Capacitive pressure sensor
- Diaphragm fabrication
- Diaphragm mechanics
- Integrated pressure sensor
- MEMS pressure sensors
- Piezoresisitive pressure sensor
- Pirani gauge
- Pressure sensor packaging
- Sensor interface circuitry
- Sensor system integration
- Sensor-circuit integration
- Vacuum sensor
- Wireless sensors
ASJC Scopus subject areas
- Engineering(all)
- Chemical Engineering(all)