Abstract
Study of interface structure of heterogeneous materials at the atomic level is best achieved by applying the HRTEM method. The success of the experiment depends on how well the metal specimens have been prepared. The conventional ion milling method is often inadequate especially in the case of a metal film on 6H-SiC substrate. Reversing partial rotation method was developed in order to alleviate the alterations caused by thinning. The RPR ion milling process is the best way to obtain specimens for HRTEM in thin-film-metal/SiC materials.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings - Annual Meeting, Microscopy Society of America |
| Publisher | Publ by San Francisco Press Inc |
| Pages | 714-715 |
| Number of pages | 2 |
| State | Published - 1993 |
| Event | Proceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA Duration: Aug 1 1993 → Aug 6 1993 |
Other
| Other | Proceedings of the 51st Annual Meeting Microscopy Society of America |
|---|---|
| City | Cincinnati, OH, USA |
| Period | 8/1/93 → 8/6/93 |
ASJC Scopus subject areas
- General Engineering