Preparation of thin-film-metal/6H-SiC TEM specimens by RPR ion milling

J. S. Bow, F. Shaapur, M. J. Kim, Ray Carpenter

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Study of interface structure of heterogeneous materials at the atomic level is best achieved by applying the HRTEM method. The success of the experiment depends on how well the metal specimens have been prepared. The conventional ion milling method is often inadequate especially in the case of a metal film on 6H-SiC substrate. Reversing partial rotation method was developed in order to alleviate the alterations caused by thinning. The RPR ion milling process is the best way to obtain specimens for HRTEM in thin-film-metal/SiC materials.

Original languageEnglish (US)
Title of host publicationProceedings - Annual Meeting, Microscopy Society of America
PublisherPubl by San Francisco Press Inc
Pages714-715
Number of pages2
StatePublished - 1993
EventProceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA
Duration: Aug 1 1993Aug 6 1993

Other

OtherProceedings of the 51st Annual Meeting Microscopy Society of America
CityCincinnati, OH, USA
Period8/1/938/6/93

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Preparation of thin-film-metal/6H-SiC TEM specimens by RPR ion milling'. Together they form a unique fingerprint.

Cite this