Precise selective scribing of thin-film solar cells by a picosecond laser

Xin Zhao, Yunfeng Cao, Qiong Nian, Yung C. Shin, Gary Cheng

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Abstract

In this paper, precise scribing of thin-film solar cells (CIGS/Mo/Glass) via a picosecond laser is investigated. A parametric study is carried out for P1 and P2 scribing to study the effects of laser fluence and overlap ratio on scribing quality and ablation depth. Three ablation regimes are observed for P1 scribing in different laser fluence ranges, due to the involvement of different ablation mechanisms. The optimum scribing conditions are determined for both P1 and P2 scribing, and the potential processing speed is significantly increased. The heat accumulation effect at different repetition rates is studied to extrapolate the results from low to high repetition rates. A two-temperature model-based model is developed to simulate the scribing process for multiple thin films, providing decent prediction of the slot depth for both P1 and P2 scribing.

Original languageEnglish (US)
Pages (from-to)671-681
Number of pages11
JournalApplied Physics A: Materials Science and Processing
Volume116
Issue number2
DOIs
StatePublished - Aug 2014
Externally publishedYes

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ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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