Two new methods for the measurement of transverse spatial coherence in a transmission electron microscope (TEM) are developed and applied to measure the spatial coherence in a field emission gun TEM. Measurements are made under different illumination and operating conditions, illustrating the effect of these conditions on the spatial coherence. The relative merits and limitations of these methods are discussed and compared, together with the previously described "Ronchigram" method.
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics