Plasma hydrogenation of strain-relaxed SiGeSi heterostructure for layer transfer

Peng Chen, Paul K. Chu, T. Höchbauer, M. Nastasi, D. Buca, S. Mantl, N. David Theodore, Terry Alford, J. W. Mayer, R. Loo, M. Caymax, M. Cai, S. S. Lau

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Physics & Astronomy