Plasma Enhanced Atomic Layer-etched and Regrown GaN-on-GaN High Power p-n Diodes

Prudhvi Ram Peri, Kevin Hatch, Daniel Messina, Kai Fu, Yuji Zhao, Robert Nemanich, David Smith

Research output: Contribution to journalComment/debatepeer-review

Original languageEnglish (US)
Pages (from-to)840-842
Number of pages3
JournalMicroscopy and Microanalysis
DOIs
StateAccepted/In press - 2020

ASJC Scopus subject areas

  • Instrumentation

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