Piezoresponse force microscopy for piezoelectric measurements of III-nitride materials

B. J. Rodriguez, A. Gruverman, A. I. Kingon, Robert Nemanich

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

Piezoelectric constants and polarity distributions of epitaxial AlN and GaN thin films are investigated by piezoresponse force microscopy (PFM). The magnitude of the effective longitudinal piezoelectric constant d33 is determined to be 3 ± 1 and 2 ± 1 pm/V for wurtzite AlN and GaN/AlN layers grown by organo-metallic vapor phase epitaxy on SiC substrates, respectively. Simultaneous imaging of surface morphology as well as the phase and magnitude of the piezoelectric response is performed by PFM on a GaN film with patterned polarities on a c-Al2O3 substrate. We demonstrate that the polarity distribution of GaN based lateral polarity heterostructures can be deduced from the phase image of the piezoresponse with nanometer scale spatial resolution. We also present images of AlN/Si samples with regions of opposite piezoresponse phase, which indicate the presence of antiphase domains. We discuss the potential application of this technique for determination of the orientation of bulk crystals.

Original languageEnglish (US)
Pages (from-to)252-258
Number of pages7
JournalJournal of Crystal Growth
Volume246
Issue number3-4
DOIs
StatePublished - Dec 16 2002
Externally publishedYes

Fingerprint

Nitrides
nitrides
polarity
Microscopic examination
microscopy
Vapor phase epitaxy
Substrates
Crystal orientation
Surface morphology
Heterojunctions
Imaging techniques
Thin films
Crystals
antiphase boundaries
vapor phase epitaxy
wurtzite
spatial resolution
thin films
crystals

Keywords

  • A1. Atomic force microscopy
  • B2. Piezoelectric materials
  • B2. Semiconducting III-V materials

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Piezoresponse force microscopy for piezoelectric measurements of III-nitride materials. / Rodriguez, B. J.; Gruverman, A.; Kingon, A. I.; Nemanich, Robert.

In: Journal of Crystal Growth, Vol. 246, No. 3-4, 16.12.2002, p. 252-258.

Research output: Contribution to journalArticle

Rodriguez, B. J. ; Gruverman, A. ; Kingon, A. I. ; Nemanich, Robert. / Piezoresponse force microscopy for piezoelectric measurements of III-nitride materials. In: Journal of Crystal Growth. 2002 ; Vol. 246, No. 3-4. pp. 252-258.
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