Piezoelectric measurements with atomic force microscopy

J. A. Christman, R. R. Woolcott, A. I. Kingon, Robert Nemanich

Research output: Contribution to journalArticle

227 Citations (Scopus)

Abstract

An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single-crystal quartz, thin film ZnO, and nonpiezoelectric SiO2 thin films.

Original languageEnglish (US)
Pages (from-to)3851-3853
Number of pages3
JournalApplied Physics Letters
Volume73
Issue number26
DOIs
StatePublished - 1998
Externally publishedYes

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atomic force microscopy
thin films
diamonds
microscopes
conduction
quartz
electrodes
electric fields
single crystals
configurations
interactions

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Piezoelectric measurements with atomic force microscopy. / Christman, J. A.; Woolcott, R. R.; Kingon, A. I.; Nemanich, Robert.

In: Applied Physics Letters, Vol. 73, No. 26, 1998, p. 3851-3853.

Research output: Contribution to journalArticle

Christman, JA, Woolcott, RR, Kingon, AI & Nemanich, R 1998, 'Piezoelectric measurements with atomic force microscopy', Applied Physics Letters, vol. 73, no. 26, pp. 3851-3853. https://doi.org/10.1063/1.122914
Christman, J. A. ; Woolcott, R. R. ; Kingon, A. I. ; Nemanich, Robert. / Piezoelectric measurements with atomic force microscopy. In: Applied Physics Letters. 1998 ; Vol. 73, No. 26. pp. 3851-3853.
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