PID controller tuning by frequency loop-shaping: Application to diffusion furnace temperature control

Elena Grassi; Konstantinos Tsakalis

doi:10.1109/87.865857

PID controller tuning by frequency loop-shaping: Application to diffusion furnace temperature control

Elena Grassi, Konstantinos Tsakalis

Electrical Engineering

Research output: Contribution to journal › Article › peer-review

73 Scopus citations

Abstract

A frequency loop-shaping technique for tuning proportional-integral-derivative controllers is applied to temperature control of a three-zone industrial diffusion furnace used in semiconductor manufacturing. In this tuning method the controller parameters are tuned so as to minimize the difference between the actual and a target loop transfer function, in an L_∞ sense. The problem is formulated in the frequency domain as a convex optimization which can be solved numerically in a reliable way. This method, combined with a system identification step, has produced very satisfactory controllers for the furnace temperature control application.

Original language	English (US)
Pages (from-to)	842-847
Number of pages	6
Journal	IEEE Transactions on Control Systems Technology
Volume	8
Issue number	5
DOIs	https://doi.org/10.1109/87.865857
State	Published - Sep 2000

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

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10.1109/87.865857

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title = "PID controller tuning by frequency loop-shaping: Application to diffusion furnace temperature control",

abstract = "A frequency loop-shaping technique for tuning proportional-integral-derivative controllers is applied to temperature control of a three-zone industrial diffusion furnace used in semiconductor manufacturing. In this tuning method the controller parameters are tuned so as to minimize the difference between the actual and a target loop transfer function, in an L∞ sense. The problem is formulated in the frequency domain as a convex optimization which can be solved numerically in a reliable way. This method, combined with a system identification step, has produced very satisfactory controllers for the furnace temperature control application.",

author = "Elena Grassi and Konstantinos Tsakalis",

note = "Funding Information: Manuscript received July 21, 1998; revised August 18, 1999 and March 13, 2000. Recommended by Associate Editor, R. Middleton. This work was supported by SEMY Engineering Inc. under Grant SEI-950815-MBTC-001. The authors are with the Department of Electrical Engineering, SSERC, Arizona State University, Tempe, AZ 85287-7606 USA. Publisher Item Identifier S 1063-6536(00)05733-X.",

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N2 - A frequency loop-shaping technique for tuning proportional-integral-derivative controllers is applied to temperature control of a three-zone industrial diffusion furnace used in semiconductor manufacturing. In this tuning method the controller parameters are tuned so as to minimize the difference between the actual and a target loop transfer function, in an L∞ sense. The problem is formulated in the frequency domain as a convex optimization which can be solved numerically in a reliable way. This method, combined with a system identification step, has produced very satisfactory controllers for the furnace temperature control application.

AB - A frequency loop-shaping technique for tuning proportional-integral-derivative controllers is applied to temperature control of a three-zone industrial diffusion furnace used in semiconductor manufacturing. In this tuning method the controller parameters are tuned so as to minimize the difference between the actual and a target loop transfer function, in an L∞ sense. The problem is formulated in the frequency domain as a convex optimization which can be solved numerically in a reliable way. This method, combined with a system identification step, has produced very satisfactory controllers for the furnace temperature control application.

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PID controller tuning by frequency loop-shaping: Application to diffusion furnace temperature control

Abstract

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