PID controller tuning by frequency loop-shaping: Application to diffusion furnace temperature control

Elena Grassi, Konstantinos Tsakalis

Research output: Contribution to journalArticle

49 Scopus citations

Abstract

A frequency loop-shaping technique for tuning proportional-integral-derivative controllers is applied to temperature control of a three-zone industrial diffusion furnace used in semiconductor manufacturing. In this tuning method the controller parameters are tuned so as to minimize the difference between the actual and a target loop transfer function, in an L sense. The problem is formulated in the frequency domain as a convex optimization which can be solved numerically in a reliable way. This method, combined with a system identification step, has produced very satisfactory controllers for the furnace temperature control application.

Original languageEnglish (US)
Pages (from-to)842-847
Number of pages6
JournalIEEE Transactions on Control Systems Technology
Volume8
Issue number5
DOIs
StatePublished - Sep 1 2000

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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