Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry: Towards environmental health and safety assessments
David Speed, Paul Westerhoff, Reyes Sierra-Alvarez, Rockford Draper, Paul Pantano, Shyam Aravamudhan, Kai Loon Chen, Kiril Hristovski, Pierre Herckes, Xiangyu Bi, Yu Yang, Chao Zeng, Lila Otero-Gonzalez, Carole Mikoryak, Blake A. Wilson, Karshak Kosaraju, Mubin Tarannum, Steven Crawford, Peng Yi, Xitong LiuS. V. Babu, Mansour Moinpour, James Ranville, Manuel Montano, Charlie Corredor, Jonathan Posner, Farhang Shadman
Dive into the research topics of 'Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry: Towards environmental health and safety assessments'. Together they form a unique fingerprint.