Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry: Towards environmental health and safety assessments

David Speed, Paul Westerhoff, Reyes Sierra-Alvarez, Rockford Draper, Paul Pantano, Shyam Aravamudhan, Kai Loon Chen, Kiril Hristovski, Pierre Herckes, Xiangyu Bi, Yu Yang, Chao Zeng, Lila Otero-Gonzalez, Carole Mikoryak, Blake A. Wilson, Karshak Kosaraju, Mubin Tarannum, Steven Crawford, Peng Yi, Xitong LiuS. V. Babu, Mansour Moinpour, James Ranville, Manuel Montano, Charlie Corredor, Jonathan Posner, Farhang Shadman

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