Phase transformations during microcutting tests on silicon

B. V. Tanikella; A. H. Somasekhar; A. T. Sowers; R. J. Nemanich; R. O. Scattergood

doi:10.1063/1.117346

Phase transformations during microcutting tests on silicon

B. V. Tanikella, A. H. Somasekhar, A. T. Sowers, R. J. Nemanich, R. O. Scattergood

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66 Scopus citations

Abstract

Controlled slow-speed microcutting tests were made on single crystal silicon. Micro-Raman spectroscopy confirmed the presence of amorphous silicon within the microcutting grooves as well as in the debris particles removed from the grooves. These results indicate that pressure-induced transformation to metallic silicon can occur during microcutting and the ductile metallic phase will facilitate the cutting process. Raman spectroscopy further indicated the presence of large residual tensile strains in some areas of the microcutting grooves.

Original language	English (US)
Pages (from-to)	2870-2872
Number of pages	3
Journal	Applied Physics Letters
Volume	69
Issue number	19
DOIs	https://doi.org/10.1063/1.117346
State	Published - Nov 4 1996
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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abstract = "Controlled slow-speed microcutting tests were made on single crystal silicon. Micro-Raman spectroscopy confirmed the presence of amorphous silicon within the microcutting grooves as well as in the debris particles removed from the grooves. These results indicate that pressure-induced transformation to metallic silicon can occur during microcutting and the ductile metallic phase will facilitate the cutting process. Raman spectroscopy further indicated the presence of large residual tensile strains in some areas of the microcutting grooves.",

author = "Tanikella, {B. V.} and Somasekhar, {A. H.} and Sowers, {A. T.} and Nemanich, {R. J.} and Scattergood, {R. O.}",

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AU - Tanikella, B. V.

AU - Somasekhar, A. H.

AU - Sowers, A. T.

AU - Nemanich, R. J.

AU - Scattergood, R. O.

PY - 1996/11/4

Y1 - 1996/11/4

N2 - Controlled slow-speed microcutting tests were made on single crystal silicon. Micro-Raman spectroscopy confirmed the presence of amorphous silicon within the microcutting grooves as well as in the debris particles removed from the grooves. These results indicate that pressure-induced transformation to metallic silicon can occur during microcutting and the ductile metallic phase will facilitate the cutting process. Raman spectroscopy further indicated the presence of large residual tensile strains in some areas of the microcutting grooves.

AB - Controlled slow-speed microcutting tests were made on single crystal silicon. Micro-Raman spectroscopy confirmed the presence of amorphous silicon within the microcutting grooves as well as in the debris particles removed from the grooves. These results indicate that pressure-induced transformation to metallic silicon can occur during microcutting and the ductile metallic phase will facilitate the cutting process. Raman spectroscopy further indicated the presence of large residual tensile strains in some areas of the microcutting grooves.

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Phase transformations during microcutting tests on silicon

Abstract

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